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IEEE
2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus);2020; ; ;
MEMS
sensor
sensor element
accelerometer
20000 g
Technological Design of the MEMS-Accelerometer Sensor Element for Ultra-Large Acceleration Ranges
Maxim S. Golovinskiy
Sergey M. Kruchinin
Aleksandr S. Musatkin
Mikhail M. Burakov
Pavel A. Gornostaev
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