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MEMS
For the last years the wide circulation was received worldwide by the sensors based on microelectromechanical systems, so-called MEMS.
MEMS — is the integrated microdevices or the systems combining electronic and mechanical components, made on the technologies compatible to technology of integrated schemes, and the having sizes from micrometers to millimeters. Connection in such systems of computer processing with sensitive and aktyuatorny components allows us to feel and supervise world around.
Popularity of these devices is caused by a variety of reasons: they are distinguished by simplicity of use, rather low price and small dimensions. MEMS, in particular micromechanical gyroscopes (MMG), are widely applied now in civil and military industries. [1]] The gyroscope is capable to react to change of corners of orientation of the related body of rather inertial system of coordinates, as a rule, based on the law of preservation of the moment of an impulse. It possesses a number of the interesting properties observed at rotating heavenly bodies, at artillery shells, at a children's top, at rotors of the turbines established on vessels, etc.
Micromechanical gyroscopes (MMG) start to be applied in the integrated systems of orientation and navigation of objects of different function, inklinometrichesky systems to the inclined directed and horizontal wells, tiny systems of orientation and management of pilotless aircraft, chairs and space suits of cosmonauts, aerials, video cameras, and also in other optical, test and diagnostic equipment.
Generally MEMS consists of the sensitive element (ChE) reacting to external indignations, and electronics for processing of an arriving signal. Practically all micromechanical gyroscopes which are let out in the world, by the principle of action are vibrating. The gyroscope is applied as a sensitive element of indicating gyroscopic devices and as the sensor of an angle of rotation or angular speed to devices of automatic control more often. In certain cases, for example in girostabilizator, gyroscopes are used as generators of the moment of force or energy. -
Complex inertia systems
We specialize on creation of inertial measuring blocks, on the basis of micromechanical sensors. Our devices measure linear accelerations and/or angular speeds on three axes, in ranges ± 2. 15 g and ± 75... 5000 ° / s. Micromechanical sensors of angular speed or gyroscopes differ small dimensions, low power consumption, and rather high precision. Generally the range of measured angular speeds makes ± 75... 5000 ° /s also special execution, with big ranges however is possible. Sensitivity of angular-rate sensor with a range ± 75 ° /s makes more than 0.01 ° /s.
Practically each our block, besides sensors, has the controler for correction of a target signal according to actual mathematical model. At will of the customer program thermocompensation, compensation of nonlinearity and temperature leaving of large-scale factor and compensation of not orthogonality of measuring axes is possible. Realization not difficult algorithms of orientation and management, for example delivery of single commands for drives of system of a horizontalizingor drives of system of stabilization is possible.